5/1/2011	9:31:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/1/2011	9:31:38 AM	Recipe started at 9:31 AM
5/1/2011	9:31:38 AM	Helium valve closed
5/1/2011	9:31:38 AM	H2 valve closed
5/1/2011	9:31:38 AM	BCl3 valve closed
5/1/2011	9:31:38 AM	PH3 valve closed
5/1/2011	9:31:38 AM	SiCl4 pre valve closed
5/1/2011	9:31:38 AM	SiCl4 post valve closed
5/1/2011	9:31:38 AM	Main Vac valve closed
5/1/2011	9:31:38 AM	Bypass valve closed
5/1/2011	9:31:38 AM	Bubbler valve closed
5/1/2011	9:31:38 AM	Helium MFC set to  0.000000
5/1/2011	9:31:38 AM	H2 MFC set to  0.000000
5/1/2011	9:31:38 AM	BCl3 MFC set to  0.000000
5/1/2011	9:31:38 AM	PHl3 MFC set to  0.000000
5/1/2011	9:31:38 AM	SiCl4 MFC set to  0.000000
5/1/2011	9:31:38 AM	Bypass solenoid MFC set to  0.000000
5/1/2011	9:31:38 AM	Tube furnace set to 0
5/1/2011	9:31:38 AM	Run finished at 9:31 AM
5/1/2011	9:31:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/1/2011	9:31:43 AM	Program exited cleanly
5/1/2011	9:34:39 AM	Program started normally
5/1/2011	9:34:42 AM	Helium valve closed
5/1/2011	9:34:42 AM	H2 valve closed
5/1/2011	9:34:42 AM	BCl3 valve closed
5/1/2011	9:34:42 AM	PH3 valve closed
5/1/2011	9:34:42 AM	SiCl4 pre valve closed
5/1/2011	9:34:42 AM	SiCl4 post valve closed
5/1/2011	9:34:42 AM	Main Vac valve closed
5/1/2011	9:34:42 AM	Bypass valve closed
5/1/2011	9:34:42 AM	Bubbler valve closed
5/1/2011	9:34:42 AM	Helium MFC set to  0.000000
5/1/2011	9:34:42 AM	H2 MFC set to  0.000000
5/1/2011	9:34:42 AM	BCl3 MFC set to  0.000000
5/1/2011	9:34:42 AM	PHl3 MFC set to  0.000000
5/1/2011	9:34:42 AM	SiCl4 MFC set to  0.000000
5/1/2011	9:34:42 AM	Bypass solenoid MFC set to  760.000000
5/1/2011	9:34:43 AM	Tube furnace set to 0
5/1/2011	9:35:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2011	9:35:50 AM	Recipe started at 9:35 AM
5/1/2011	9:35:50 AM	Helium valve closed
5/1/2011	9:35:50 AM	H2 valve closed
5/1/2011	9:35:50 AM	BCl3 valve closed
5/1/2011	9:35:50 AM	PH3 valve closed
5/1/2011	9:35:50 AM	SiCl4 pre valve closed
5/1/2011	9:35:50 AM	SiCl4 post valve closed
5/1/2011	9:35:50 AM	Main Vac valve closed
5/1/2011	9:35:50 AM	Bubbler valve closed
5/1/2011	9:35:50 AM	Bypass valve opened
5/1/2011	9:35:50 AM	Helium MFC set to  0.000000
5/1/2011	9:35:50 AM	H2 MFC set to  0.000000
5/1/2011	9:35:50 AM	BCl3 MFC set to  0.000000
5/1/2011	9:35:50 AM	PHl3 MFC set to  0.000000
5/1/2011	9:35:50 AM	SiCl4 MFC set to  0.000000
5/1/2011	9:35:50 AM	Bypass solenoid MFC set to  0.000000
5/1/2011	9:35:51 AM	Tube furnace set to 0
5/1/2011	9:35:51 AM	Helium valve closed
5/1/2011	9:35:51 AM	H2 valve closed
5/1/2011	9:35:51 AM	BCl3 valve closed
5/1/2011	9:35:51 AM	PH3 valve closed
5/1/2011	9:35:51 AM	SiCl4 pre valve closed
5/1/2011	9:35:51 AM	SiCl4 post valve closed
5/1/2011	9:35:51 AM	Bubbler valve closed
5/1/2011	9:35:51 AM	Main Vac valve opened
5/1/2011	9:35:51 AM	Bypass valve opened
5/1/2011	9:35:51 AM	Helium MFC set to  0.000000
5/1/2011	9:35:51 AM	H2 MFC set to  0.000000
5/1/2011	9:35:51 AM	BCl3 MFC set to  0.000000
5/1/2011	9:35:51 AM	PHl3 MFC set to  0.000000
5/1/2011	9:35:51 AM	SiCl4 MFC set to  0.000000
5/1/2011	9:35:51 AM	Bypass solenoid MFC set to  0.000000
5/1/2011	9:35:51 AM	Tube furnace set to 0
5/1/2011	9:35:51 AM	Run finished at 9:35 AM
5/1/2011	9:35:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2011	8:47:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2011	8:47:09 PM	Recipe started at 8:47 PM
5/1/2011	8:47:09 PM	H2 valve closed
5/1/2011	8:47:09 PM	BCl3 valve closed
5/1/2011	8:47:09 PM	PH3 valve closed
5/1/2011	8:47:09 PM	SiCl4 pre valve closed
5/1/2011	8:47:09 PM	SiCl4 post valve closed
5/1/2011	8:47:09 PM	Main Vac valve closed
5/1/2011	8:47:09 PM	Bypass valve closed
5/1/2011	8:47:09 PM	Bubbler valve closed
5/1/2011	8:47:09 PM	Helium valve opened
5/1/2011	8:47:09 PM	Helium MFC set to  500.000000
5/1/2011	8:47:09 PM	H2 MFC set to  0.000000
5/1/2011	8:47:09 PM	BCl3 MFC set to  0.000000
5/1/2011	8:47:09 PM	PHl3 MFC set to  0.000000
5/1/2011	8:47:09 PM	SiCl4 MFC set to  0.000000
5/1/2011	8:47:09 PM	Bypass solenoid MFC set to  0.000000
5/1/2011	8:47:10 PM	Tube furnace set to 0
5/1/2011	8:48:29 PM	Helium valve closed
5/1/2011	8:48:29 PM	H2 valve closed
5/1/2011	8:48:29 PM	BCl3 valve closed
5/1/2011	8:48:29 PM	PH3 valve closed
5/1/2011	8:48:29 PM	SiCl4 pre valve closed
5/1/2011	8:48:29 PM	SiCl4 post valve closed
5/1/2011	8:48:29 PM	Main Vac valve closed
5/1/2011	8:48:29 PM	Bypass valve closed
5/1/2011	8:48:29 PM	Bubbler valve closed
5/1/2011	8:48:29 PM	Helium MFC set to  0.000000
5/1/2011	8:48:29 PM	H2 MFC set to  0.000000
5/1/2011	8:48:29 PM	BCl3 MFC set to  0.000000
5/1/2011	8:48:29 PM	PHl3 MFC set to  0.000000
5/1/2011	8:48:29 PM	SiCl4 MFC set to  0.000000
5/1/2011	8:48:29 PM	Bypass solenoid MFC set to  0.000000
5/1/2011	8:48:29 PM	Tube furnace set to 0
5/1/2011	8:48:30 PM	Run finished at 8:48 PM
5/1/2011	8:48:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2011	8:50:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2011	8:50:31 PM	Recipe started at 8:50 PM
5/1/2011	8:50:31 PM	Helium valve closed
5/1/2011	8:50:31 PM	H2 valve closed
5/1/2011	8:50:31 PM	BCl3 valve closed
5/1/2011	8:50:31 PM	PH3 valve closed
5/1/2011	8:50:31 PM	SiCl4 pre valve closed
5/1/2011	8:50:31 PM	SiCl4 post valve closed
5/1/2011	8:50:31 PM	Main Vac valve closed
5/1/2011	8:50:31 PM	Bubbler valve closed
5/1/2011	8:50:31 PM	Bypass valve opened
5/1/2011	8:50:31 PM	Helium MFC set to  0.000000
5/1/2011	8:50:31 PM	H2 MFC set to  0.000000
5/1/2011	8:50:31 PM	BCl3 MFC set to  0.000000
5/1/2011	8:50:31 PM	PHl3 MFC set to  0.000000
5/1/2011	8:50:31 PM	SiCl4 MFC set to  0.000000
5/1/2011	8:50:31 PM	Bypass solenoid MFC set to  0.000000
5/1/2011	8:50:31 PM	Tube furnace set to 0
5/1/2011	8:51:03 PM	Helium valve closed
5/1/2011	8:51:03 PM	H2 valve closed
5/1/2011	8:51:03 PM	BCl3 valve closed
5/1/2011	8:51:03 PM	PH3 valve closed
5/1/2011	8:51:03 PM	SiCl4 pre valve closed
5/1/2011	8:51:03 PM	SiCl4 post valve closed
5/1/2011	8:51:03 PM	Bubbler valve closed
5/1/2011	8:51:03 PM	Main Vac valve opened
5/1/2011	8:51:03 PM	Bypass valve opened
5/1/2011	8:51:03 PM	Helium MFC set to  0.000000
5/1/2011	8:51:03 PM	H2 MFC set to  0.000000
5/1/2011	8:51:03 PM	BCl3 MFC set to  0.000000
5/1/2011	8:51:03 PM	PHl3 MFC set to  0.000000
5/1/2011	8:51:03 PM	SiCl4 MFC set to  0.000000
5/1/2011	8:51:03 PM	Bypass solenoid MFC set to  0.000000
5/1/2011	8:51:03 PM	Tube furnace set to 0
5/1/2011	8:51:03 PM	Run finished at 8:51 PM
5/1/2011	8:51:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2011	9:05:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2011	9:05:57 PM	Recipe started at 9:05 PM
5/1/2011	9:05:57 PM	H2 valve closed
5/1/2011	9:05:57 PM	BCl3 valve closed
5/1/2011	9:05:57 PM	PH3 valve closed
5/1/2011	9:05:57 PM	SiCl4 pre valve closed
5/1/2011	9:05:57 PM	SiCl4 post valve closed
5/1/2011	9:05:57 PM	Main Vac valve closed
5/1/2011	9:05:57 PM	Bypass valve closed
5/1/2011	9:05:57 PM	Bubbler valve closed
5/1/2011	9:05:57 PM	Helium valve opened
5/1/2011	9:05:57 PM	Helium MFC set to  500.000000
5/1/2011	9:05:57 PM	H2 MFC set to  0.000000
5/1/2011	9:05:57 PM	BCl3 MFC set to  0.000000
5/1/2011	9:05:57 PM	PHl3 MFC set to  0.000000
5/1/2011	9:05:57 PM	SiCl4 MFC set to  0.000000
5/1/2011	9:05:57 PM	Bypass solenoid MFC set to  0.000000
5/1/2011	9:05:57 PM	Tube furnace set to 0
5/1/2011	9:07:17 PM	Helium valve closed
5/1/2011	9:07:17 PM	H2 valve closed
5/1/2011	9:07:17 PM	BCl3 valve closed
5/1/2011	9:07:17 PM	PH3 valve closed
5/1/2011	9:07:17 PM	SiCl4 pre valve closed
5/1/2011	9:07:17 PM	SiCl4 post valve closed
5/1/2011	9:07:17 PM	Main Vac valve closed
5/1/2011	9:07:17 PM	Bypass valve closed
5/1/2011	9:07:17 PM	Bubbler valve closed
5/1/2011	9:07:17 PM	Helium MFC set to  0.000000
5/1/2011	9:07:17 PM	H2 MFC set to  0.000000
5/1/2011	9:07:17 PM	BCl3 MFC set to  0.000000
5/1/2011	9:07:17 PM	PHl3 MFC set to  0.000000
5/1/2011	9:07:17 PM	SiCl4 MFC set to  0.000000
5/1/2011	9:07:17 PM	Bypass solenoid MFC set to  0.000000
5/1/2011	9:07:17 PM	Tube furnace set to 0
5/1/2011	9:07:17 PM	Run finished at 9:07 PM
5/1/2011	9:07:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2011	9:10:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2011	9:10:42 PM	Recipe started at 9:10 PM
5/1/2011	9:10:42 PM	Helium valve closed
5/1/2011	9:10:42 PM	H2 valve closed
5/1/2011	9:10:42 PM	BCl3 valve closed
5/1/2011	9:10:42 PM	PH3 valve closed
5/1/2011	9:10:42 PM	SiCl4 pre valve closed
5/1/2011	9:10:42 PM	SiCl4 post valve closed
5/1/2011	9:10:42 PM	Main Vac valve closed
5/1/2011	9:10:42 PM	Bubbler valve closed
5/1/2011	9:10:42 PM	Bypass valve opened
5/1/2011	9:10:42 PM	Helium MFC set to  0.000000
5/1/2011	9:10:42 PM	H2 MFC set to  0.000000
5/1/2011	9:10:42 PM	BCl3 MFC set to  0.000000
5/1/2011	9:10:42 PM	PHl3 MFC set to  0.000000
5/1/2011	9:10:42 PM	SiCl4 MFC set to  0.000000
5/1/2011	9:10:42 PM	Bypass solenoid MFC set to  0.000000
5/1/2011	9:10:42 PM	Tube furnace set to 0
5/1/2011	9:11:14 PM	Helium valve closed
5/1/2011	9:11:14 PM	H2 valve closed
5/1/2011	9:11:14 PM	BCl3 valve closed
5/1/2011	9:11:14 PM	PH3 valve closed
5/1/2011	9:11:14 PM	SiCl4 pre valve closed
5/1/2011	9:11:14 PM	SiCl4 post valve closed
5/1/2011	9:11:14 PM	Bubbler valve closed
5/1/2011	9:11:14 PM	Main Vac valve opened
5/1/2011	9:11:14 PM	Bypass valve opened
5/1/2011	9:11:14 PM	Helium MFC set to  0.000000
5/1/2011	9:11:14 PM	H2 MFC set to  0.000000
5/1/2011	9:11:14 PM	BCl3 MFC set to  0.000000
5/1/2011	9:11:14 PM	PHl3 MFC set to  0.000000
5/1/2011	9:11:14 PM	SiCl4 MFC set to  0.000000
5/1/2011	9:11:14 PM	Bypass solenoid MFC set to  0.000000
5/1/2011	9:11:14 PM	Tube furnace set to 0
5/1/2011	9:11:14 PM	Run finished at 9:11 PM
5/1/2011	9:11:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2011	9:19:06 PM	Helium valve opened
5/1/2011	9:19:10 PM	Helium MFC set to  100.000000
5/1/2011	9:19:21 PM	Helium MFC set to  0.000000
5/1/2011	9:19:23 PM	Helium valve closed
5/1/2011	9:19:57 PM	Recipe started at 9:19 PM
5/1/2011	9:19:57 PM	BCl3 valve closed
5/1/2011	9:19:57 PM	PH3 valve closed
5/1/2011	9:19:57 PM	SiCl4 pre valve closed
5/1/2011	9:19:57 PM	SiCl4 post valve closed
5/1/2011	9:19:57 PM	Main Vac valve closed
5/1/2011	9:19:57 PM	Bypass valve closed
5/1/2011	9:19:57 PM	Bubbler valve closed
5/1/2011	9:19:57 PM	Helium valve opened
5/1/2011	9:19:57 PM	H2 valve opened
5/1/2011	9:19:57 PM	Helium MFC set to  190.000000
5/1/2011	9:19:57 PM	H2 MFC set to  10.000000
5/1/2011	9:19:57 PM	BCl3 MFC set to  0.000000
5/1/2011	9:19:57 PM	PHl3 MFC set to  0.000000
5/1/2011	9:19:57 PM	SiCl4 MFC set to  0.000000
5/1/2011	9:19:57 PM	Bypass solenoid MFC set to  0.000000
5/1/2011	9:19:57 PM	Tube furnace set to 0
5/1/2011	9:23:21 PM	BCl3 valve closed
5/1/2011	9:23:21 PM	PH3 valve closed
5/1/2011	9:23:21 PM	SiCl4 pre valve closed
5/1/2011	9:23:21 PM	SiCl4 post valve closed
5/1/2011	9:23:21 PM	Main Vac valve closed
5/1/2011	9:23:21 PM	Bypass valve closed
5/1/2011	9:23:21 PM	Helium valve opened
5/1/2011	9:23:21 PM	H2 valve opened
5/1/2011	9:23:21 PM	Bubbler valve opened
5/1/2011	9:23:21 PM	Helium MFC set to  47.500000
5/1/2011	9:23:21 PM	H2 MFC set to  2.500000
5/1/2011	9:23:21 PM	BCl3 MFC set to  0.000000
5/1/2011	9:23:21 PM	PHl3 MFC set to  0.000000
5/1/2011	9:23:21 PM	SiCl4 MFC set to  0.000000
5/1/2011	9:23:21 PM	Bypass solenoid MFC set to  0.000000
5/1/2011	9:23:22 PM	Tube furnace set to 350
